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tsuprem4

By Steven Clark

Purdue University

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.

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Version 1.4 - published on 26 Aug 2014

doi:10.4231/D3NC5SD32 cite this

This tool is closed source.

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Versions

Version Released DOI Handle Published
1.4 26 Aug 2014 doi:10.4231/D3NC5SD32 yes
1.3 27 Jul 2009 doi:10.4231/D3MK6578X no
1.2 15 Jul 2008 doi:10.4231/D32B8VB40 no
1.1 16 Jan 2008 doi:10.4231/D3WS8HK6W no
1.0 20 Apr 2007 doi:10.4231/D31J9771W no

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