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By Steven Clark

Purdue University

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.

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Version 1.3 - published on 27 Jul 2009

doi:10.4231/D3MK6578X cite this

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Version Released DOI Handle Published
1.3 27 Jul 2009 doi:10.4231/D3MK6578X yes
1.2 15 Jul 2008 doi:10.4231/D32B8VB40 no
1.1 16 Jan 2008 doi:10.4231/D3WS8HK6W no
1.0 20 Apr 2007 doi:10.4231/D31J9771W no

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