Measuring Youngs Modulus

By Aarti Chigullapalli1, Jason Clark1

1. Purdue University

An accurate and precise method for measuring the Youngs modulus of MEMS with comb drives by electronic probing of capacitance.

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Archive Version 0.1
Published on 02 Jul 2012, unpublished on 03 Jul 2012 All versions

doi:10.4231/D3K649S3G cite this