Need Help?
Find information on common issues.
Ask questions and find answers from other users.
Suggest a new site feature or improvement.
Check on status of your tickets.
Silvaco Athena - Part 3
Ranking is calculated from a formula comprised of user reviews and usage data. Learn more ›
09 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.
http://nanohub.org/resources/11819
nanoHUB.org, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies.