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Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides
26 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices. Thermal oxidation and several types of deposition are discussed. Activities provide further exploration into these processes as well as the properties...
Javier Merón Pino
[Illinois] Nano EP Series: Nanosoldering Carbon Nanotube Junctions with Metal via Local Chemical Vapor Deposition for Improved Device Performance
18 Dec 2012 | | Contributor(s):: Jae Won-Do
Carbon nanotube network (CNTN) devices are useful in integrated circuits and display drivers, particularly in applications that make use of thin film transistors (TFTs) on flexible or transparent substrates. However, in such CNTN devices, the performance is usually limited by high electrical and...