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Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides
26 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices. Thermal oxidation and several types of deposition are discussed. Activities provide further exploration into these processes as well as the properties...