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1. 

   Claire Mihalko

   https://nanohub.org/members/410839

2. Learning Module: Deposition Processes Overview for Microsystems

   28 Apr 2016 | | Contributor(s):: Support Center for Microsystems Education (SCME), MJ Willis

   This learning module is an overview of the common deposition processes used for the fabrication of micro-size devices.  This learning module discusses thermal oxidation, chemical deposition and physical deposition processes.  Activities are provided for further exploration into these...

3. Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides

   26 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

   This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices.  Thermal oxidation and several types of deposition are discussed.  Activities provide further exploration into these processes as well as the properties...