nanoHUB will be intermittently unavailable due to scheduled host maintenance on Sunday, January 21st, 2018 from 7:00 am ET through 5:00 pm ET. All tool sessions will be expired when maintenance begins. We apologize for any inconvenience.
Find information on common issues.
Ask questions and find answers from other users.
Suggest a new site feature or improvement.
Check on status of your tickets.
Silvaco Athena - Part 2
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Illinois ECE598XL Semiconductor Nanotechnology - 2 - Nanostructure Epitaxial Growth Techniques
27 Jun 2011 | Online Presentations | Contributor(s): Xiuling Li