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Learning Module: Etch Processes Overview for Microsystems - Instructor Guides
25 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module introduces the most common etch processes used for the fabrication of microsystems. Activities allow students to demonstrate their understanding of the terminology and basic concepts of these processes.
Wet Etching in Nanofabrication
11 Jan 2017 | | Contributor(s):: Manuel Casillas
This lab will help students understand how chemical reactions are used to create the specific shapes on surfaces of crystalline materials, which make up functional components within electronics. The fabrication of electronic devices is now reaching into the nanoscale with the capability of more...
ECE 695Q Lecture 44: Etching
02 Dec 2016 | | Contributor(s):: Minghao Qi
ECE 695Q Lecture 46: Dry Etching II
01 Dec 2016 | | Contributor(s):: Minghao Qi
ECE 695Q Lecture 47: Dry Etching III
Sean M Rinehart
Silvaco Athena - Part 2
04 Aug 2011 | | Contributor(s):: Dragica Vasileska
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.