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08 Jun 2010 | Contributor(s):: David K. Ferry, Dragica Vasileska, Gerhard Klimeck
In mineralogy and crystallography, a crystal structure is a unique arrangement of atoms in a crystal. A crystal structure is composed of a basis, a set of atoms arranged in a particular way, and a lattice. The basis is located upon the points of a lattice spanned by lattice vectors, which is an...
Learning Module: Deposition Processes Overview for Microsystems
28 Apr 2016 | | Contributor(s):: SCME NM, MJ Willis
This learning module is an overview of the common deposition processes used for the fabrication of micro-size devices. This learning module discusses thermal oxidation, chemical deposition and physical deposition processes. Activities are provided for further exploration into these...
Learning Module: Etch Processes Overview for Microsystems
25 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module introduces the most common etch processes used for the fabrication of microsystems. Activities allow you to demonstrate your understanding of the terminology and basic concepts of these processes.