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I am a graduate research assistant at the University of Michigan- Ann Arbor, working in the Millunchick group. My research exams ion irradiation effects on III-V semiconductor film growth, ion beam …
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23 Aug 2011 | Series | Contributor(s): Dragica Vasileska
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
Silvaco Athena - Part 1
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
ACUTE - Process Simulation Assignment
28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck
This assignment teaches the students the ion implantation process.
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