Tags: ion implantation

Questions & Answers (1-2 of 2)

  1. Can I use this version to simulate a two-stage implantation process with multiple dopants, energy levels, and tilt angles?

    Q&A|Open | Responses: 1

    https://nanohub.org/answers/question/2658

  2. Tsuprem4 simulation

    Q&A|Closed | Responses: 0

    I am using Tsuprem4 , i want to simulate germanium ion implant with different AMU

    How to write in the  tsuprem4 deck the changing of different type of AMU

    tahnks for...

    https://nanohub.org/answers/question/1495