Tags: lithography

All Categories (1-20 of 44)

  1. ECE 695Q Lecture 42: Advanced Lithography II

    02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25157

  2. ECE 695Q Lecture 43: Advanced Lithography III

    01 Nov 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25158

  3. ECE 695Q Lecture 41: Advanced Lithography I

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25003

  4. ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25000

  5. ECE 695Q Lecture 37: Nanoimprint Lithography (NIL) - Resist for UV-NIL

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24961

  6. ECE 695Q Lecture 36: Nanoimprint Lithography (NIL) – Alignment in NIL

    28 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24960

  7. ECE 695Q Lecture 39: Nanoimprint Lithography (NIL) – NIL Tools

    26 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25001

  8. ECE 695Q Lecture 40: Nanoimprint Lithography (NIL) – Other NIL Approaches

    26 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25002

  9. ECE 695Q Lecture 32: Nanoimprint Lithography (NIL) – Overview and Thermal NIL Resists

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24956

  10. ECE 695Q Lecture 33: Nanoimprint Lithography – Residual Layer After Nanoimprint

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24957

  11. ECE 695Q Lecture 34: Nanoimprint Lithography – Pattern Dependence in Nanoimprint

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24958

  12. ECE 695Q Lecture 35: Nanoimprint Lithography – UV Assisted Nanoimprint

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24959

  13. ECE 695Q Lecture 21: E-Beam Lithography Process

    20 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24444

  14. ECE 695Q: Nanometer Scale Patterning and Processing

    11 Jul 2016 | Courses | Contributor(s): Minghao Qi

    This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The...

    http://nanohub.org/resources/24028

  15. ECE 695Q Lecture 16: Electron Optics and Lithography I

    29 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24439

  16. ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24289

  17. ECE 695Q Lecture 15: Extreme UV (EUV) Lithography – Optics, Mask, Resist, and Contaminaton Control

    17 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24438

  18. ECE 695Q Lecture 17: Electron Optics and Lithography II

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24440

  19. ECE 695Q Lecture 14: Extreme UV (EUV) Lithography – EUV Source (Hot and Dense Plasma)

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24437

  20. ECE 695Q Lecture 22: Shaped-Electron-Beam Lithography

    16 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24445