Tags: lithography

Courses (1-2 of 2)

  1. ECE 695Q: Nanometer Scale Patterning and Processing

    11 Jul 2016 | | Contributor(s):: Minghao Qi

    This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The couse provides a survey of state-of-the-art nanofabrication techniques.

  2. ME 290R: Topics in Manufacturing - Nanoscale Manipulation of Materials

    27 Mar 2019 | | Contributor(s):: Taylor, Hayden

    This graduate level course surveys sub-micrometer pattern-transfer techniques with applications in semiconductor manufacturing, data storage, photonics, and surface engineering.