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[Illinois] Piezoelectric MEMS Devices for Future RF Front Ends
13 Apr 2017 | Contributor(s):: Songbin Gong
9/8/2016MNTL Industry Affiliates Program
RF Solid-State Vibrating Transistors
15 Feb 2014 | | Contributor(s):: Dana Weinstein
In this talk, I will discuss the Resonant Body Transistor (RBT), which can be integrated into a standard CMOS process. The first hybrid RF MEMS-CMOS resonators in Si at the transistor level of IBM’s SOI CMOS process, without any post-processing or packaging will be described. ...
Vacuum Nanosystemsfor Energy Conversion
01 Feb 2013 | | Contributor(s):: Roger T. Howe
Micro and nano-fabricated sensors (e.g., accelerometers and gyroscopes) and actuators (e.g., light valve chips for projection and cell-phone displays) have become commonplace in recent years. Some of these devices must operate in a hermetically sealed, lowpressure ambient, a need that motivated...
Illinois CNST Annual Nanotechnology Workshop 2011: Nanoscale Force Sensors for Biological Applications
13 Jun 2012 | | Contributor(s):: Taher A. Saif
Near-field radiative heat transfer and Casimir Force Measurement
30 May 2012 | | Contributor(s):: Joel Chevrier
This presentation first makes a simple introduction on how the charge fluctuations give rises to these effects that are nowadays most effectively detected using MEMS or AFM technologies. This will lead to question the relevance of these effects in the use of MEMS. After description of our...
Particle Simulations of Ion Generation and Transport in Microelectromechanical Systems and Micropropulsion
29 May 2012 | | Contributor(s):: Venkattraman Ayyaswamy
The first part of the talk deals with use of the PIC method with Monte Carlo collisions (MCC) between electrons and the ambient neutral gas to develop models to predict charge accumulation, breakdown voltage, etc. for various ambient gases, gap sizes, cathode material, and frequency of applied...
2010 MNTL UIUC Symposium Lecture 4 - MicroElectronics
09 Aug 2010 | | Contributor(s):: Shyh-Chiang Shen