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Nano Electro-Mechanical Systems (NEMS) are tiny
machines built at the nanometer scale. Current
NEMS applications are simple machines, such as
the tiny cantilever shown at the right. An electrical circuit measures the deflection
of the lever. A larger version of this device,
with dimensions at the micrometer or millimeter
scale, is commonly used as an airbag sensor in
automobiles. A sudden stop causes a strong
deflection of the lever, which signals that
the airbags should be deployed. At the nano
scale, such a lever is sensitive enough to
measure the weight of individual atoms or
molecules resting upon it.
Learn more about NEMS from the
resources available on this site, listed below.
Creating Inflections: DARPA’s Electronics Resurgence Initiative
09 Jan 2019 | | Contributor(s):: William Chappell
In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation
06 Jun 2012 | | Contributor(s):: Muhammad Alam
In this talk, I will discuss an elementary theory of the role of nanostructured electrodes in addressing some of the challenges from a fundamentally different perspective. The goal is to start a conversation regarding the viability of the approaches suggested and see if the perspective offered is...
Illinois BioNanotechnology Seminar Series Fall 2011: Deconvolving Stiffness in MEMS Pedestal Cell Mass Measurements
05 Dec 2011 | | Contributor(s):: Elise Corbin
The complex relationships between a cell's behavior and the physical properties of both itself and its environment have long been of interest. Specifically, the understanding the mechanisms through which a cell's physical properties influence cell growth, cell differentiation, cell cycle...
Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS
02 May 2011 | | Contributor(s):: Narayan Aluru
2009 GEM4 Summer School - University of Illinois at Urbana-Champaign Lecture 5: Mechanics insights into the pathophysiology of human disease; Microfluidics approaches to studying human diseases
20 Jul 2010 | | Contributor(s):: Chwee Teck Lim
Peanuts vs. Pyramids: Two Perspectives on MEMS
29 Dec 2009 | | Contributor(s):: Stephen D. Senturia
MEMS, the acronym for Micro-electromechanical Systems, also known simply as “Micro-systems,” come in two main types: commodity products (the peanuts) and MEMS-enabled products (the pyramids, or, more correctly, the inverted pyramids). The economics of scale greatly affect how these two classes of...
Molecular Sensors for MEMS
10 Dec 2009 | | Contributor(s):: John P. Sullivan
This seminar will cover the issues involved in using molecular sensors in MEMS and their application to microchannels, supersonic micronozzles, microjet impingement, microturbines and unsteady fluidic actuators.
Nanotribology, Nanomechanics and Materials Characterization Studies
08 Jun 2009 | | Contributor(s):: Bharat Bhushan
Fundamental nanotribological studies provide insight to molecular origins of interfacial phenomena including adhesion, friction, wear and lubrication. Friction and wear of lightly loaded micro/nano components are highly dependent on the surface interactions (few atomic layers). Nanotribological...
The Challenges of Micro-System Product Development
05 Jun 2009 | | Contributor(s):: James J. Allen
This talk will discuss the historical development of micro‐system technology, the products that have been developed and the challenges to development of a reliable product.
Experiences with nonintrusive polynomial Chaos and stochastic collocation methods for uncertainty analysis and design
out of 5 stars
13 Mar 2009 | | Contributor(s):: Michael S. Eldred
Non—intrusive polynomial chaos expansion (PCE) and stochastic collocation (SC) methods are attractive techniques for uncertainty quantification due to their abilities to produce functional representations of stochastic variability and to achieve exponential convergence rates in statistics of...
Gas Damping of Microcantilevers at Low Ambient Pressures
03 Nov 2008 | | Contributor(s):: Rahul Anil Bidkar
This seminar will present a theoretical model for predicting the gas damping of long, rectangular silicon microcantilevers, which are oscillating in an unbounded gaseous medium with the ambient pressures varying over 5 orders of magnitude (1000 > Kn > 0.03). The work is the result of a...
Micro-fabricated Biosensors for Cardiac Diagnostics
30 Jul 2008 | | Contributor(s):: V.Ramgopal Rao
In this talk the current status of an ongoing effort in the Electrical Engineering Department at IIT Bombay on the development of an integrated systems to provide point-of-care diagnostic support for cardiovascular diseases will be presented. The system under development monitors the molecular...
High-Aspect-Ratio Micromachining of Titanium: Enabling New Functionality and Opportunity in Micromechanical Systems Through Greater Materials Selection
18 Jun 2008 | | Contributor(s):: Masa Rao
Traditionally, materials selection has been limited in high-aspect-ratio micromechanical applications, due primarily to the predominance of microfabrication processes and infrastructure dedicated to silicon. While silicon has proven to be an excellent material for many of these applications, no...
BNC Annual Research Review: An Introduction to PRISM and MEMS Simulation
04 Jun 2008 | | Contributor(s):: Jayathi Murthy
This presentation is part of a collection of presentations describing the projects, people, and capabilities enhanced by research performed in the Birck Center, and a look at plans for the upcoming year.
BNC Research Review: The Birck Nanotechnology Center-Progress, Opportunitiees, and Challenges
04 Jun 2008 | | Contributor(s):: Timothy D. Sands
Tutorial for NanogromacsSenior
28 Apr 2008 | | Contributor(s):: Dairui Chen
Ferroelectric BaTiO3 Nanowires: Synthesis, Properties, and Device Applications
12 Feb 2008 | | Contributor(s):: Zhaoyu Wang
One dimensional ferroelectric nanowires have attracted much attention due to its interests in fundamental physics and potential applications in Nanoelectromechanical Systems (NEMS), non-volatile ferroelectric memories, and sensors. Domain structure is the most important property of ferroelectric...
An Experimentalists’ Perspective
19 Dec 2007 | | Contributor(s):: Arunava Majumdar
This presentation was one of 13 presentations in the one-day forum, "Excellence in Computer Simulation," which brought together a broad set of experts to reflect on the future of computational science and engineering.
Plastic Deformation at Micron and Submicron Scales
28 Nov 2007 | | Contributor(s):: Marisol Koslowski
Most people experiences the way objects plastically deform on a macroscopic scale. From a car crash to the bending of a paper clip plastic deformation occurs in the form of a smooth flow as a response of an applied stress. But due to the constant shrinking on the dimensions of mechanical devices...
Microscale Ionic Wind for Local Cooling Enhancement
26 Oct 2007 | | Contributor(s):: David B Go
As the electronics industry continues to develop small, highly functional, mobile devices, new methods of cooling are required to manage the thermal requirements of the not only the chip but the entire system. Comfortable skin temperatures, small form factors, and limited power consumption are...