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Nano Electro-Mechanical Systems (NEMS) are tiny
machines built at the nanometer scale. Current
NEMS applications are simple machines, such as
the tiny cantilever shown at the right. An electrical circuit measures the deflection
of the lever. A larger version of this device,
with dimensions at the micrometer or millimeter
scale, is commonly used as an airbag sensor in
automobiles. A sudden stop causes a strong
deflection of the lever, which signals that
the airbags should be deployed. At the nano
scale, such a lever is sensitive enough to
measure the weight of individual atoms or
molecules resting upon it.
Learn more about NEMS from the
resources available on this site, listed below.
ME 290R Lecture 9: Lithography for MEMS and Microfluidics
08 May 2019 | | Contributor(s):: Taylor, Hayden
Creating Inflections: DARPA’s Electronics Resurgence Initiative
09 Jan 2019 | | Contributor(s):: William Chappell
Oyedamola Andrew Asiyanbola
Srinivas Varma Pericherla
Mohd Qasim Malik
Learning Module: Microcantilevers - Instructor Materials
09 Feb 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module is an overview of microcantilevers, how they work and how they are used in micro and nanotechnology. These are the instructor materials.
Akhil Devdas Prabhu
Syed Shajar Ali Imam
Smt. A. Naga Malli
18 Feb 2016 | | Contributor(s):: Jason Clark, Quincy Clark
CAD for MEMS via systems of compact models. This commercial tool is published by Sugarcube Systems, which requires a registration fee to use. The nanoHUB does not receive revenue or assume liability for the use of this tool.
Double-Clamped Silicon NEMS Resonators Model
22 Feb 2016 | Compact Models | Contributor(s):
By Yanfei Shen1, Scott Calvert1, Jeffrey F. Rhoads1, Saeed Mohammadi1
This model is built for a silicon-based, double-clamped (source and drain), double-gate beam. The model takes into account capacitive modulation with the two gates, piezoresistive modulation...
Uniaxial and Biaxial Stress Strain Calculator for Semiconductors
16 Jan 2014 | | Contributor(s):: Jamie Teherani
Simulate stress or strain along user-defined Miller directions for arbitrary stress/strain configurations.