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Wet Etching in Nanofabrication
11 Jan 2017 | Teaching Materials | Contributor(s): Manuel Casillas
This lab will help students understand how chemical reactions are used to create the specific shapes on surfaces of crystalline materials, which make up functional components within electronics....
Small Scale Stenciling
09 Jan 2017 | Teaching Materials | Contributor(s): Marilyn Garza
This lab is analogous with some nanofabrication processes. This lab will help students understand some of the challenges encountered while making semiconductor chips and waveguides, both of which...
ECE 695Q: Nanometer Scale Patterning and Processing
11 Jul 2016 | Courses | Contributor(s): Minghao Qi
This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The...
ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics
21 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi
[Illinois] Interdisciplinary Symposium on Advanced Nano/Biosystems (Design, Fabrication, and Characterization)
17 Dec 2013 | Workshops
The Interdisciplinary Symposium on Advanced Nano/Biosystems: Design, Fabrication, and Characterization aims to provide a stimulating discussing forum for recent advances in material design,...
Translational Research in Nano and Bio Mechanics
18 Nov 2010 | Online Presentations | Contributor(s): Ken P. Chong
One of the most challenging problems is the integration and interface between wet (biological) and dry (structural) materials. Nano and bio science and engineering is one of the frontiers in...