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ECE 695Q Lecture 36: Nanoimprint Lithography (NIL) – Alignment in NIL
28 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 39: Nanoimprint Lithography (NIL) – NIL Tools
26 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 40: Nanoimprint Lithography (NIL) – Other NIL Approaches
26 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 32: Nanoimprint Lithography (NIL) – Overview and Thermal NIL Resists
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 33: Nanoimprint Lithography – Residual Layer After Nanoimprint
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 34: Nanoimprint Lithography – Pattern Dependence in Nanoimprint
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 35: Nanoimprint Lithography – UV Assisted Nanoimprint
21 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 21: E-Beam Lithography Process
20 Sep 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q: Nanometer Scale Patterning and Processing
11 Jul 2016 | | Contributor(s):: Minghao Qi
This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The couse provides a survey of state-of-the-art nanofabrication techniques.
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ECE 695Q Lecture 16: Electron Optics and Lithography I
29 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics
21 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques
17 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 15: Extreme UV (EUV) Lithography – Optics, Mask, Resist, and Contaminaton Control
17 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 17: Electron Optics and Lithography II
16 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 14: Extreme UV (EUV) Lithography – EUV Source (Hot and Dense Plasma)
16 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 18: Electron Beam Lithography I
14 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 13: Extreme UV (EUV) Lithography – Overview, Why EUV Lithography?
14 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 12: Optical Lithography – Contrast and Resolution in Microscopy and Lithography Systems
06 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 08: Optical Lithography – Alignment
06 Jun 2016 | | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 05: Resist Technology
06 Jun 2016 | | Contributor(s):: Minghao Qi