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ECE 695Q: Nanometer Scale Patterning and Processing
11 Jul 2016 | Courses | Contributor(s): Minghao Qi
This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The...
ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics
21 Jun 2016 | Online Presentations | Contributor(s): Minghao Qi
Muhammad Shuja Khan
[Illinois] Interdisciplinary Symposium on Advanced Nano/Biosystems (Design, Fabrication, and Characterization)
17 Dec 2013 | Workshops
The Interdisciplinary Symposium on Advanced Nano/Biosystems: Design, Fabrication, and Characterization aims to provide a stimulating discussing forum for recent advances in material design,...
Wei Zhen Leong
Sep 21 2012
Fifth Annual Nanotechnology and Nanomedicine Symposium
Md Sohrab Hossain
Abizer A Vejlani
Farzan Abu Mitul