Tags: nano imprinting

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  1. ME 290R Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II

    15 Apr 2019 |

  2. ME 290R Lecture 5: Nanoimprint Lithography – Stamp Fabrication

    15 Apr 2019 | | Contributor(s):: Taylor, Hayden

  3. ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I

    15 Apr 2019 | | Contributor(s):: Taylor, Hayden

  4. ME 290R Lecture 6.2: Nanoimprint Lithography – Machine Design II

    15 Apr 2019 | | Contributor(s):: Taylor, Hayden

  5. ME 290R Lecture 4.1: Nanoimprint Lithography – Imprintable Materials I

    05 Apr 2019 | | Contributor(s):: Taylor, Hayden

  6. ME 290R Lecture 3.1: Nanoimprint Lithography - Process Mechanics I

    02 Apr 2019 | | Contributor(s):: Taylor, Hayden

  7. ME 290R Lecture 3.2: Nanoimprint Lithography - Process Mechanics II

    02 Apr 2019 | | Contributor(s):: Taylor, Hayden

  8. ME 290R Lecture 3.3: Nanoimprint Lithography - Process Mechanics III

    02 Apr 2019 | | Contributor(s):: Taylor, Hayden

  9. ME 290R Lecture 3.4: Nanoimprint Lithography - Process Mechanics IV

    02 Apr 2019 | | Contributor(s):: Taylor, Hayden

  10. ME 290R Lecture 1: Introduction

    27 Mar 2019 | | Contributor(s):: Taylor, Hayden

    An overview of current and emerging lithography technologies and challenges. Future lithography requirements (with reference to the International Technology Roadmap for Semiconductors). Requirements for integration of lithography with other process steps.

  11. ME 290R Lecture 2.1: Lithography Performance Criteria - Technical

    27 Mar 2019 | | Contributor(s):: Taylor, Hayden

    Ways to evaluate a lithography process. Topics include: resolution; line edge roughness; overlay capability; throughput; cost of ownership; capital cost; energy consumption and environmental impact (e.g. solvent usage; material wastage); pattern dependencies.

  12. May 06 2010

    Illinois CNST ANNUAL NANOTECHNOLOGY WORKSHOP 2010

    The broad objective of the Center for Nanoscale Science and Technology (CNST) workshop is to showcase University of Illinois research in bionanotechnology/ nanomedicine,...

    http://nanohub.org/events/details/268

  13. Illinois ME 498 Introduction of Nano Science and Technology, Lecture 28: Nanomanufacturing 3: Imprint Technology

    28 Jan 2010 | | Contributor(s):: Nick Fang

    Nanomanufacturing 3: Imprint TechnologyTopics: Imprinting: A Long History Nanoimprinting and Hot Embossing Example of nanoimprint machine Volume Manufacture Large-Scale NIL Examples Step and Flash imprint Lithography(SFIL) Application Example: Security NIL application in metamaterials Imprinting...