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Nano Electro-Mechanical Systems (NEMS) are tiny
machines built at the nanometer scale. Current
NEMS applications are simple machines, such as
the tiny cantilever shown at the right. An electrical circuit measures the deflection
of the lever. A larger version of this device,
with dimensions at the micrometer or millimeter
scale, is commonly used as an airbag sensor in
automobiles. A sudden stop causes a strong
deflection of the lever, which signals that
the airbags should be deployed. At the nano
scale, such a lever is sensitive enough to
measure the weight of individual atoms or
molecules resting upon it.
Learn more about NEMS from the
resources available on this site, listed below.
Srinivas Varma Pericherla
Mohd Qasim Malik
Learning Module: Microcantilevers - Instructor Materials
09 Feb 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module is an overview of microcantilevers, how they work and how they are used in micro and nanotechnology. These are the instructor materials.
Akhil Devdas Prabhu
Syed Shajar Ali Imam
Smt. A. Naga Malli
18 Feb 2016 | | Contributor(s):: Jason Clark, Quincy Clark
CAD for MEMS via systems of compact models. This commercial tool is published by Sugarcube Systems, which requires a registration fee to use. The nanoHUB does not receive revenue or assume liability for the use of this tool.
Double-Clamped Silicon NEMS Resonators Model
22 Feb 2016 | Compact Models | Contributor(s):
By Yanfei Shen1, Scott Calvert1, Jeffrey F. Rhoads1, Saeed Mohammadi1
This model is built for a silicon-based, double-clamped (source and drain), double-gate beam. The model takes into account capacitive modulation with the two gates, piezoresistive modulation...
Uniaxial and Biaxial Stress Strain Calculator for Semiconductors
16 Jan 2014 | | Contributor(s):: Jamie Teherani
Simulate stress or strain along user-defined Miller directions for arbitrary stress/strain configurations.
Nov 14 2013
Akshay Kumar Mahadev Arabhavi
Akshaya M V
Sebastian V T
In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation
03 May 2012 | | Contributor(s):: Muhammad Alam
In this talk, I will discuss an elementary theory of the role of nanostructured electrodes in addressing some of the challenges from a fundamentally different perspective. The goal is to start a conversation regarding the viability of the approaches suggested and see if the perspective offered...