Tags: photo resist

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  1. Learning Module: Photolithography Overview for MEMS

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. ...

    http://nanohub.org/resources/26380

  2. Learning Module: Photolithography Overview for MEMS - Instructor Guides

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning modules provides an overview of the most common photolithography process used in the fabrication of microelectromechnical systems (MEMS), its terminology and basic concepts. ...

    http://nanohub.org/resources/26371