Find information on common issues.
Ask questions and find answers from other users.
Suggest a new site feature or improvement.
Check on status of your tickets.
Learning Module: MEMS Micromachining Overview
22 Jun 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). ...
Learning Module: MEMS Micromachining Overview - Instructor Guides
Learning Module: Photolithography Overview for MEMS
26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. ...
Small Scale Stenciling: Mask Lab
05 Apr 2016 | Teaching Materials | Contributor(s): Marilyn Garza
This lab is analogous with some nanofabrication processes. This lab will help students understand some of the challenges encountered while making semiconductor chips and waveguides, both of which...
Silvaco Athena - Part 1
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
Silvaco Athena - Part 2
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Device Parameters Extraction Within Silvaco Simulation Software
30 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of slides explains the extract statements within SILVACO simulation software.