Tags: processing

Teaching Materials (1-7 of 7)

  1. Device Parameters Extraction Within Silvaco Simulation Software

    30 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This set of slides explains the extract statements within SILVACO simulation software.

    http://nanohub.org/resources/11769

  2. Learning Module: MEMS Micromachining Overview

    22 Jun 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). ...

    http://nanohub.org/resources/26733

  3. Learning Module: MEMS Micromachining Overview - Instructor Guides

    22 Jun 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). ...

    http://nanohub.org/resources/26734

  4. Learning Module: Photolithography Overview for MEMS

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. ...

    http://nanohub.org/resources/26380

  5. Silvaco Athena - Part 1

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

    http://nanohub.org/resources/11814

  6. Silvaco Athena - Part 2

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

    http://nanohub.org/resources/11816

  7. Small Scale Stenciling: Mask Lab

    05 Apr 2016 | Teaching Materials | Contributor(s): Marilyn Garza

    This lab is analogous with some nanofabrication processes. This lab will help students understand some of the challenges encountered while making semiconductor chips and waveguides, both of which...

    http://nanohub.org/resources/23932