Device Parameters Extraction Within Silvaco Simulation Software

30 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

This set of slides explains the extract statements within SILVACO simulation software.

https://nanohub.org/resources/11769

Silvaco Athena - Part 1

04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

https://nanohub.org/resources/11814

Silvaco Athena - Part 2

04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

https://nanohub.org/resources/11816