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Device Parameters Extraction Within Silvaco Simulation Software
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30 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of slides explains the extract statements within SILVACO simulation software.
Silvaco Athena - Part 1
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
Silvaco Athena - Part 2
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
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