Tags: processing

All Categories (1-20 of 97)

  1. Learning Module: Photolithography Overview for MEMS

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. ...

    http://nanohub.org/resources/26380

  2. ECE 695Q Lecture 42: Advanced Lithography II

    02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25157

  3. ECE 695Q Lecture 45: Dry Etching I

    02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25160

  4. ECE 695Q Lecture 44: Etching

    02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25159

  5. ECE 695Q Lecture 46: Dry Etching II

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25161

  6. ECE 695Q Lecture 47: Dry Etching III

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25162

  7. ECE 695Q Lecture 48: Planarization I

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25167

  8. ECE 695Q Lecture 49: Planarization II

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25168

  9. ECE 695Q Lecture 43: Advanced Lithography III

    01 Nov 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25158

  10. ECE 695Q Lecture 41: Advanced Lithography I

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25003

  11. ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25000

  12. ECE 695Q Lecture 37: Nanoimprint Lithography (NIL) - Resist for UV-NIL

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24961

  13. ECE 695Q Lecture 29: Focused Electron Beam Induced Deposition and Deposition Rate

    10 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24469

  14. ECE 695Q Lecture 36: Nanoimprint Lithography (NIL) – Alignment in NIL

    28 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24960

  15. ECE 695Q Lecture 39: Nanoimprint Lithography (NIL) – NIL Tools

    26 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25001

  16. ECE 695Q Lecture 40: Nanoimprint Lithography (NIL) – Other NIL Approaches

    26 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/25002

  17. ECE 695Q Lecture 32: Nanoimprint Lithography (NIL) – Overview and Thermal NIL Resists

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24956

  18. ECE 695Q Lecture 33: Nanoimprint Lithography – Residual Layer After Nanoimprint

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24957

  19. ECE 695Q Lecture 34: Nanoimprint Lithography – Pattern Dependence in Nanoimprint

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24958

  20. ECE 695Q Lecture 35: Nanoimprint Lithography – UV Assisted Nanoimprint

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    http://nanohub.org/resources/24959