Process Modeling

23 Aug 2011 | Series | Contributor(s): Dragica Vasileska

This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.

https://nanohub.org/resources/11909

Silvaco Athena - Part 3

09 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.

https://nanohub.org/resources/11819

Introduction to process modeling

04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck

This set of slides introduces the students into basic concepts of process modeling.

https://nanohub.org/resources/11806

Silvaco Athena - Part 1

04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

https://nanohub.org/resources/11814

Silvaco Athena - Part 2

04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

https://nanohub.org/resources/11816

ACUTE - Process Simulation Assignment

28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck

This assignment teaches the students the ion implantation process.

https://nanohub.org/resources/11742