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ACUTE - Process Simulation Assignment
28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck
This assignment teaches the students the ion implantation process.
Introduction to process modeling
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck
This set of slides introduces the students into basic concepts of process modeling.
23 Aug 2011 | Series | Contributor(s): Dragica Vasileska
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
Silvaco Athena - Part 1
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
Silvaco Athena - Part 2
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Silvaco Athena - Part 3
09 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.