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Tags: process modeling

Resources (1-6 of 6)

  1. Silvaco Athena - Part 3

    09 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.

    http://nanohub.org/resources/11819

  2. Introduction to process modeling

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck

    This set of slides introduces the students into basic concepts of process modeling.

    http://nanohub.org/resources/11806

  3. Silvaco Athena - Part 1

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

    http://nanohub.org/resources/11814

  4. Silvaco Athena - Part 2

    04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska

    This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

    http://nanohub.org/resources/11816

  5. ACUTE - Process Simulation Assignment

    28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck

    This assignment teaches the students the ion implantation process.

    http://nanohub.org/resources/11742

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