Tags: process modeling

Teaching Materials (1-5 of 5)

  1. Silvaco Athena - Part 3

    09 Aug 2011 | Contributor(s):: Dragica Vasileska

    This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.

  2. Introduction to process modeling

    04 Aug 2011 | Contributor(s):: Dragica Vasileska, Gerhard Klimeck

    This set of slides introduces the students into basic concepts of process modeling.

  3. Silvaco Athena - Part 1

    04 Aug 2011 | Contributor(s):: Dragica Vasileska

    This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.

  4. Silvaco Athena - Part 2

    04 Aug 2011 | Contributor(s):: Dragica Vasileska

    This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

  5. ACUTE - Process Simulation Assignment

    28 Jul 2011 | Contributor(s):: Dragica Vasileska, Gerhard Klimeck

    This assignment teaches the students the ion implantation process.