Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Find information on common issues.
Ask questions and find answers from other users.
Suggest a new site feature or improvement.
Check on status of your tickets.
ACUTE - Process Simulation Assignment
28 Jul 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck
This assignment teaches the students the ion implantation process.
Introduction to process modeling
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska, Gerhard Klimeck
This set of slides introduces the students into basic concepts of process modeling.
Silvaco Athena - Part 1
04 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
Silvaco Athena - Part 2
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Silvaco Athena - Part 3
09 Aug 2011 | Teaching Materials | Contributor(s): Dragica Vasileska
This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.