Tags: Process simulation

Resources (1-1 of 1)

  1. Exploration of the Oxidation Rate of Silicon Wafers via Simulation

    04 Nov 2014 | | Contributor(s):: Tanya Faltens

    This teaching resource is designed for instructors who would like to introduce exploration through simulation into their lessons on silicon oxidation.  Step-by-step instructions are provided for running the process lab oxidation simulation, and guiding questions are provided that should...