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Double-Clamped Silicon NEMS Resonators Model
22 Feb 2016 | Compact Models | Contributor(s):
By Yanfei Shen1, Scott Calvert1, Jeffrey F. Rhoads1, Saeed Mohammadi1
Micro/Nanoelectromechanical systems (M/NEMS) are gaining great momentum and interest in a variety ofapplications, such as high-sensitivity mass sensing, tunable signal filtering and precision...