Tags: silicon germanium

Presentation Materials (1-1 of 1)

  1. Structure and Morphology of Silicon-Germanium Thin Films

    07 Feb 2015 | Contributor(s):: Brian Demczyk

    This presentation describes the growth of (Si,Ge & SiGe) thin films on Si and Ge (001) and (111) substrates by ultrahigh vacuum chemical vapor deposition (UHVCVD). Thin films were characterized structurally by conventional and high-resolution transmission electron microscopy (TEM) and...