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Vacuum Nanosystemsfor Energy Conversion
01 Feb 2013 | | Contributor(s):: Roger T. Howe
Micro and nano-fabricated sensors (e.g., accelerometers and gyroscopes) and actuators (e.g., light valve chips for projection and cell-phone displays) have become commonplace in recent years. Some of these devices must operate in a hermetically sealed, lowpressure ambient, a need that motivated...