
ECE 612 Lecture 18B: CMOS Process Flow
18 Nov 2008  Online Presentations  Contributor(s): Mark Lundstrom
For a basic, CMOS process flow for an STI (shallow trench isolation process), see: http://www.rit.edu/~lffeee/AdvCmos2003.pdf.
This lecture is a condensed version of the more complete...
http://nanohub.org/resources/5855

ECE 612 Lecture 20: Broad Overview of Reliability of Semiconductor MOSFET
14 Nov 2008  Online Presentations  Contributor(s): Muhammad A. Alam
Guest lecturer: Muhammad A. Alam.
http://nanohub.org/resources/5861

ECE 612 Lecture 19: Device Variability
14 Nov 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline:
1) Sources of variability,
2) Random dopantfluctuations (RDF),
3) Line edge roughness (LER),
4) Impact on design.
http://nanohub.org/resources/5856

ECE 612 Lecture 18A: CMOS Process Steps
12 Nov 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline: 1) Unit Process Operations,
2) Process Variations.
http://nanohub.org/resources/5788

Lecture 2: Thresholds, Islands, and Fractals
04 Nov 2008  Online Presentations  Contributor(s): Muhammad A. Alam
Three basic concepts of the percolation theory – namely, percolation threshold, cluster size distribution, and fractal dimension – are defined and methods to calculate them are illustrated via...
http://nanohub.org/resources/5698

Lecture 1: Percolation in Electronic Devices
04 Nov 2008  Online Presentations  Contributor(s): Muhammad A. Alam
Even a casual review of modern electronics quickly convinces everyone that randomness of geometrical parameters must play a key role in understanding the transport properties. Despite the...
http://nanohub.org/resources/5697

ECE 612 Lecture 17: Gate Resistance and Interconnects
03 Nov 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline:
1) Gate Resistance,
2) Interconnects,
3) ITRS,
4) Summary.
http://nanohub.org/resources/5700

ECE 612 Lecture 16: MOSFET Leakage
31 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline:
1) MOSFET leakage components,
2) Band to band tunneling,
3) Gateinduced drain leakage,
4) Gate leakage,
5) Scaling and ITRS,
6) Summary.
http://nanohub.org/resources/5688

ECE 612 Lecture 15: Series Resistance (and effective channel length)
29 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline:
1) Effect on IV,
2) Series resistance components,
3) Metalsemiconductor resistance,
4) Other series resistance components,
5) Discussion,
6) Effective Channel Length,
7) Summary.
http://nanohub.org/resources/5675

ECE 612 Lecture 14: VT Engineering
28 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline: 1) VT Specification,
2) Uniform Doping,
3) Deltafunction doping, xC = 0,
4) Deltafunction doping, xC > 0,
5) Stepwise uniform,
6) Integral solution.
The doping profiles in...
http://nanohub.org/resources/5670

ECE 612 Lecture 12: 2D Electrostatics
28 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline:
1) Consequences of 2D electrostatics,
2) 2D Poisson equation,
3) Charge sharing model,
4) Barrier lowering,
5) 2D capacitor model,
6) Geometric screening length,
7) Discussion,
8)...
http://nanohub.org/resources/5624

ECE 612 Lecture 11: Effective Mobility
20 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline:
1) Review of mobility,
2) “Effective”mobility,
3) Physics of the effective mobility,
4) Measuring effective mobility,
5) Discussion,
6) Summary.
http://nanohub.org/resources/5619

ECE 612 Lecture 8: Scattering Theory of the MOSFET II
08 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline: 1) Review and introduction,
2) Scattering theory of the MOSFET,
3) Transmission under low VDS,
4) Transmission under high VDS,
5) Discussion,
6) Summary.
http://nanohub.org/resources/5368

ECE 612 Lecture 7: Scattering Theory of the MOSFET I
08 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline: 1) Review and introduction,
2) Scattering theory of the MOSFET,
3) Transmission under low VDS,
4) Transmission under high VDS,
5) Discussion,
6) Summary.
http://nanohub.org/resources/5367

ECE 612 Lecture 6: MOSFET IV: Velocity saturation
07 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline: 1) Review,
2) Bulk charge theory (approximate),
3) Velocity saturation theory,
4) Summary.
http://nanohub.org/resources/5366

ECE 612 Lecture 5: MOSFET IV: Square law and bulk charge
07 Oct 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline: 1) Introduction,
2) Square law theory,
3) PN junction effects on MOSFETs,
4) Bulk charge theory (exact),
5) Summary.
http://nanohub.org/resources/5365

Introductory Comments
29 Sep 2008  Online Presentations  Contributor(s): Muhammad A. Alam
http://nanohub.org/resources/5502

Lecture 7: Connection to the Bottom Up Approach
23 Sep 2008  Online Presentations  Contributor(s): Mark Lundstrom
While the previous lectures have been in the spirit of the bottom up approach, they did not follow the generic device model of Datta. In this lecture, the ballistic MOSFET theory will be formally...
http://nanohub.org/resources/5314

Lecture 6: Quantum Transport in Nanoscale FETs
12 Sep 2008  Online Presentations  Contributor(s): Mark Lundstrom
The previous lessons developed an analytical (or almost analytical) theory of the nanoscale FET, but to properly treat all the details, rigorous computer simulations are necessary. This lecture...
http://nanohub.org/resources/5313

ECE 612 Lecture 4: Polysilicon Gates/QM Effects
12 Sep 2008  Online Presentations  Contributor(s): Mark Lundstrom
Outline: 1) Review, 2) Workfunctionof poly gates,
3) CV with poly depletion,
4) Quantum mechanics and VT,
5) Quantum mechanics and C,
6) Summary.
http://nanohub.org/resources/5364