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19 Aug 2010
What are the procedures for nano photolithography? better have doc.
05 Sep 2010
I am not so clear about your question. But if you are asking about the techniques for nanolithography, the most used one is electron beam lithography.You can go till sub-10nm with a good EBL tool. There are laser writing systems, which will give you near 100nm resolution. There are some terminologies which are not so popular like these, eg, nanosphere lithography, EUV lithography, Phase shift litography etc.
But , of course in industry, they are depending on Steppers.
Hope it is kind of helpful to you..
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