Coral Name: xrd
FIC: Michael Capano
Process/Equipment Owner: Jerry Shepard
Max Wafer Size: 4
*Panalytical MRD X'Pert Pro High Resolution XRD
*Primarily for high resolution single crystal diffraction
*12 arc second resolution. Peak matching database. Epitaxy and reflectivity simulation tools.
*small samples to 4 inch wafers
* Must install Coral and be a trained user to reserve a slot on this system.