Support

Support Options

Submit a Support Ticket

Close

Equipment

XRD

General Information:

Coral Name: xrd
FIC: Michael Capano
Process/Equipment Owner: John Coy
Location: brk1045
Max Wafer Size: 4

System Information:

General Description:

*Panalytical MRD X'Pert Pro High Resolution XRD
*Primarily for high resolution single crystal diffraction

Capabilities:

*12 arc second resolution. Peak matching database. Epitaxy and reflectivity simulation tools.
*small samples to 4 inch wafers

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.