Coral Name: CMP
Process/Equipment Owner: Geoff Gardner
Location: BRK 2031
This Logitech Chemical Mechanical Polishing System can be used for planarization of samples up to 8" in diameter. This process uses abrasive and corrosive chemical slurries along with mechanical polishing to smooth the surface. This tool has independent control for;
main plate speed,
slurry feed rate,
All materials to be processed must be approved by Geoff Gardner & Steve Jurss. Consumable materials such as polishing pads and slurries may need to be purchased by the user.
* Must install Coral and be a trained user to reserve a slot on this system.