Coral Name: Fiji200_ALD
FIC: Zhihong Chen
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom Bay G
Max Wafer Size: 8
General use ALD for Al2O3, and HfO2, TiO2
Easily configurable for other materials
Clean, vacuum compatible non-outgassing materials. Check with John Coy for compatibality.
* Must install Coral and be a trained user to reserve a slot on this system.