nanoHUB could be intermittently unavailable on 05/04 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/04 at 8:00 am (EST).
Coral Name: Fiji200_ALD
FIC: Zhihong Chen
Process/Equipment Owner: John Coy
Location: Cleanroom Bay G
Max Wafer Size: 8
General use ALD for Al2O3, and HfO2, TiO2
Easily configurable for other materials
Clean, vacuum compatible non-outgassing materials. Check with John Coy for compatibality.
* Must install Coral and be a trained user to reserve a slot on this system.