Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: nanotube_pecvd
FIC: Tim Fisher
Process/Equipment Owner: Jerry Shepard
Max Wafer Size: 2
Seki Techtron Diamond PECVD modified to grow carbon nanotubes.
Limited access, see PI
Check with Tim Fisher
* Must install Coral and be a trained user to reserve a slot on this system.