DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: nanotube_pecvd
FIC: Tim Fisher
Process/Equipment Owner: John Coy
Max Wafer Size: 2
Seki Techtron Diamond PECVD modified to grow carbon nanotubes.
Limited access, see PI
Check with Tim Fisher
* Must install Coral and be a trained user to reserve a slot on this system.