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Carbon Nanotube PECVD

Equipment home > Deposition > Carbon Nanotube PECVD

General Information:

Coral Name: nanotube_pecvd
FIC: Tim Fisher
Process/Equipment Owner: John Coy
Location: brk2283
Max Wafer Size: 2

System Information:

General Description:

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.


Limited access, see PI

Materials Compatibility:

Check with Tim Fisher

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.