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Equipment

CHA E-beam Evaporator

Equipment home > Deposition > CHA E-beam Evaporator

General Information:

Coral Name: cha
FIC: Minghao Qi
Process/Equipment Owner: Kenny Schwartz Dave Lubelski
Location: Cleanroom-Bay K
Max Wafer Size: 4

System Information:

General Description:

~E-beam evaporates materials with a 4 pocket hearth
-Pockets hold 8.2 cc crucible liners
-Substrate fixture can hold four 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
-uses an Inficon deposition controller to monitor deposition thickness

Capabilities:

Materials: Au, Ag, Pt, Pd, In, Si, Co, Nb, Fe, TiO2, Ge,Ti, Cr, Al, Ni, Cu, SiO2

Materials Compatibility:

Ti, Au, Pt, Pd, Al, Ni, Ge, Cr, Ag

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.