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Airco E-beam Evaporator

Equipment home > Deposition > Airco E-beam Evaporator

General Information:

Coral Name: airco
FIC: Minghao Qi
Process/Equipment Owner: Kenny Schwartz
Location: Cleanroom-Bay L
Max Wafer Size: 5

System Information:

General Description:

~E-beam evaporates materials with a 4 pocket hearth
~Pockets hold 3.7 cc crucible liners
~Substrate fixture can hold four 4" wafers with rotation
~uses a Telemark 860 deposition controller to monitor deposition thickness
~uses a load lock vacuum system.


Fully automatic system. Materials: Au, Pt, Ti, Cr

Materials Compatibility:

Ti, Au, Cr, Pt

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.