Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: CVD Equipment
Process/Equipment Owner: Jerry Shepard
Location: BRK 2221
Max Wafer Size: 4
Graphene thermal and plasma deposition system.
Please see PI for sample approval.
* Must install Coral and be a trained user to reserve a slot on this system.