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Equipment

Easy Tube 3000 CVD

Equipment home > Deposition > Easy Tube 3000 CVD

General Information:

Coral Name: CVD Equipment
FIC: Shared
Process/Equipment Owner: Jerry Shepard
Location: BRK 2221
Max Wafer Size: 4

System Information:

General Description:

Graphene thermal and plasma deposition system.

Capabilities:

Please see PI for sample approval.

Materials Compatibility:

Si, Cu

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.