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Equipment

Epigress

General Information:

Coral Name: epigress
FIC: Michael Capano
Process/Equipment Owner: John Coy
Location: brk2221
Max Wafer Size: 2 or 6

System Information:

General Description:

~Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.
-Capable of p and n type growth.

Capabilities:

~Grows single crystal on pieces up to six inch wafers.
-No metals are allowed in this system.
-Growth temperatures from 1100 C to 1650 C

Materials Compatibility:

Silicon Carbide, Si

Notes:

Very limited access.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.