Coral Name: epigress
FIC: Michael Capano
Process/Equipment Owner: John Coy
Max Wafer Size: 2 or 6
~Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.
-Capable of p and n type growth.
~Grows single crystal on pieces up to six inch wafers.
-No metals are allowed in this system.
-Growth temperatures from 1100 C to 1650 C
Silicon Carbide, Si
Very limited access.
* Must install Coral and be a trained user to reserve a slot on this system.