nanoHUB could be intermittently unavailable on 05/04 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/04 at 8:00 am (EST).


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General Information:

Coral Name: epigress
FIC: Michael Capano
Process/Equipment Owner: John Coy
Location: brk2221
Max Wafer Size: 2 or 6

System Information:

General Description:

~Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.
-Capable of p and n type growth.


~Grows single crystal on pieces up to six inch wafers.
-No metals are allowed in this system.
-Growth temperatures from 1100 C to 1650 C

Materials Compatibility:

Silicon Carbide, Si


Very limited access.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.