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Aixtron BlackMagic ALD

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General Information:

Coral Name: BlackMagic_ALD
FIC: Piede Ye
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom Bay G
Max Wafer Size: 2

System Information:

General Description:

Graphene based thermal and plasma ALD.


Please see PI for sample approval.

Materials Compatibility:

Clean, vacuum compatible non-outgassing materials. Check with John Coy for compatibality.

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.