Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.
Coral Name: BlackMagic_ALD
FIC: Piede Ye
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom Bay G
Max Wafer Size: 2
Graphene based thermal and plasma ALD.
Please see PI for sample approval.
Clean, vacuum compatible non-outgassing materials. Check with John Coy for compatibality.
* Must install Coral and be a trained user to reserve a slot on this system.