Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: BlackMagic_ALD
FIC: Piede Ye
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom Bay G
Max Wafer Size: 2
Graphene based thermal and plasma ALD.
Please see PI for sample approval.
Clean, vacuum compatible non-outgassing materials. Check with John Coy for compatibality.
* Must install Coral and be a trained user to reserve a slot on this system.