FIC: Michael Manfra
Process/Equipment Owner: Geoff Gardner
Location: BNC Lab 2277
The RIBER 2000 Molecular Beam Epitaxy (MBE) System is capable of growing on 2" substrates. This MBE features a Load Lock chamber, Reflective High Energy Electron Diffraction (RHEED) and automation software. Sources include nitrogen plasma, Ga, In, Al, and Si for doping.
Check with Michael Manfra
This tool has restricted use policies. However samples and structures can be considered for fabrication on an individual basis.
* Must install Coral and be a trained user to reserve a slot on this system.