DATE CHANGE: nanoHUB could be intermittently unavailable on 05/06 from 8:00 am – 1:00 pm (EST) for scheduled maintenance. All tool sessions will expire on 05/06 at 8:00 am (EST).
Coral Name: Glancing Angle Electron Beam Evaporator
FIC: Alexandra Boltasseva
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom Bay L
Max Wafer Size: 4
4- Pocket Electron Beam Evaporator
Large capacity 25cc crucibles, water cooled stage, capable of depositing +/-90 degrees, Materials allowed - Ag, SiO2, Ge, Base pressure of 2x10-8 torr
Check with Prof. Shalaev
* Must install Coral and be a trained user to reserve a slot on this system.