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GLAD E-Beam Evaporator

Equipment home > Deposition > GLAD E-Beam Evaporator

General Information:

Coral Name: Glancing Angle Electron Beam Evaporator
FIC: Alexandra Boltasseva
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom Bay L
Max Wafer Size: 4

System Information:

General Description:

4- Pocket Electron Beam Evaporator

Capabilities:

Large capacity 25cc crucibles, water cooled stage, capable of depositing +/-90 degrees, Materials allowed - Ag, SiO2, Ge, Base pressure of 2x10-8 torr

Materials Compatibility:

Check with Prof. Shalaev

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.