Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.
Coral Name: leybold
FIC: Minghao Qi
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay K
Max Wafer Size: 4
~E-beam evaporates materials with a 6 pocket hearth
-Pockets hold 15cc pocket volume with 8.2cc liner volume
-Substrate fixture can hold two 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
-uses an Inficon deposition controller to monitor deposition thickness
~Materials: Ti, SiO2, Al, Fe, Ag, Al2O3, Ni, Au, Cr, Pd, NiCr, Co, Pd
Ti, Co, Cu, Al, Ni, Ag, PY, Al2O3, SiO2, Au, Fe, Cr
* Must install Coral and be a trained user to reserve a slot on this system.