Due to local system maintenance on Tuesday, September 27th, nanoHUB will be unable to launch simulation jobs on clusters conte, rice, carter, and hansen. We apologize for any inconvenience.

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Equipment

Leybold E-beam Evaporator

Equipment home > Deposition > Leybold E-beam Evaporator

General Information:

Coral Name: leybold
FIC: Minghao Qi
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay K
Max Wafer Size: 4

System Information:

General Description:

~E-beam evaporates materials with a 6 pocket hearth

-Pockets hold 15cc pocket volume with 8.2cc liner volume

-Substrate fixture can hold two 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers

-uses an Inficon deposition controller to monitor deposition thickness

Capabilities:

~Materials: Ti, SiO2, Al, Fe, Ag, Al2O3, Ni, Au, Cr, Pd, NiCr, Co, Pd

Materials Compatibility:

Ti, Co, Cu, Al, Ni, Ag, PY, Al2O3, SiO2, Au, Fe, Cr

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.