Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: leybold
FIC: Minghao Qi
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay K
Max Wafer Size: 4
~E-beam evaporates materials with a 6 pocket hearth
-Pockets hold 15cc pocket volume with 8.2cc liner volume
-Substrate fixture can hold two 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
-uses an Inficon deposition controller to monitor deposition thickness
~Materials: Ti, SiO2, Al, Fe, Ag, Al2O3, Ni, Au, Cr, Pd, NiCr, Co, Pd
Ti, Co, Cu, Al, Ni, Ag, PY, Al2O3, SiO2, Au, Fe, Cr
* Must install Coral and be a trained user to reserve a slot on this system.