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MFP-3D-BIO Atomic Force Microscope

Equipment home > Deposition > MFP-3D-BIO Atomic Force Microscope

General Information:

Coral Name: Asylum_MFP_3D_Bio
FIC: Ron Reifenberger
Process/Equipment Owner: Jerry Shepard
Location: BRK 1081
Max Wafer Size: 2

System Information:

General Description:

The MFP-3D-BIOTM AFM provides high resolution images and accurate force measurement in both air and liquid. Features include: Advanced optical capabilities: The MFP-3D-BIO AFM is integrated with an inverted optical microscope (Olympus IX71), supporting optical microscopy techniques like phase contrast and fluorescence microscopy.
•Environmental controls: vibration isolation; fluid cell; petri dish holder and heater.
-Lowest noise: 8 pm cantilever deflection noise (typical), 20 pm guaranteed.
•Closed loop sensors on all three axes provides high precision 3D motion.
•iDriveTM technique simplifies imaging in liquid, ideal for imaging living biological samples


•X&Y axes: 90µm range in closed loop; resolution 0.5 nm limited only by sensor noise. Sensor linearity better than 0.5%.
•Z axis: >15 µm range; resolution 0.25 nm limited only by sensor noise. Sensor linearity better than 0.05%.
•Cantilever deflection measurement: Noise <0.02 nm; typical 0.008 nm. Linearity better than 0.5%. Measures cantilever resonances up to 2 MHz standard.

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* Must install Coral and be a trained user to reserve a slot on this system.