Upcoming reboots on Thursday, October 27th, will cause tool sessions to be lost. Sorry for any inconvenience.
Coral Name: perkin_elmer_2400
FIC: David Janes
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay S
Max Wafer Size: 8
* 500 Watt RF power supply for mangnatron sputtering
*one 8" diameter table to load substrate
*chamber holds three 8" diameter targets
Targets installed are Ti, Al with 1% Si, and WSi4
* Must install Coral and be a trained user to reserve a slot on this system.