General Information:

Coral Name: perkin_elmer_2400
FIC: David Janes
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom-Bay S
Max Wafer Size: 8

System Information:

General Description:

* 500 Watt RF power supply for mangnatron sputtering
*one 8" diameter table to load substrate
*chamber holds three 8" diameter targets

Capabilities:

Targets installed are Ti, Al with 1% Si, and WSi4

Useful Links:

• Equipment Use Fees
• Reserve System

* Must install Coral and be a trained user to reserve a slot on this system.