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PVD Sputterer #1

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General Information:

Coral Name: Metal/di-electric sputtering system
FIC: Joerg Appenzeller
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom Bay S
Max Wafer Size: 4

System Information:

General Description:

Magnetic Sputtering


DC/RF sputtering capable, 2" targets, base pressure 5x10-6torr, materials include: ta, Ru, Mg), Cu, W, NiFe, CoFeB, Mo

Materials Compatibility:

Au, Ti, Al, N, Al(1%Si), WSi4, TiO2, Al2O3, Si3N4, Mo

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.