Coral Name: Metal/di-electric sputtering system
FIC: Joerg Appenzeller
Process/Equipment Owner: Dave Lubelski
Location: Cleanroom Bay S
Max Wafer Size: 4
DC/RF sputtering capable, 2" targets, base pressure 5x10-6torr, materials include: ta, Ru, Mg), Cu, W, NiFe, CoFeB, Mo
Au, Ti, Al, N, Al(1%Si), WSi4, TiO2, Al2O3, Si3N4, Mo
* Must install Coral and be a trained user to reserve a slot on this system.